- 0.7 µm repeatability , with the ability to store points for later inspection and analysis.
- <1 µm resolution possible.
- Incorporates IST and stage mapping systems
- Accepts linear encoders, further improving accuracy.
- Versatile:
- Controlled via the ProScan® III Control System.
- Travel range 154 x 154 mm.
- Anti-backlash mechanism with adjustable limit switches.
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